Inductively Coupled Plasma (ICP) Etching System Market 2024 – Market Size & Segments Analysis, Industry Trends, Manufacturers Analysis, Opportunities and Forecast 2030

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An inductively coupled plasma (ICP) etching system is a type of plasma etching method that rely on an RF powered magnetic field for plasma formation. This plasma is further employed for the etching of different types of materials like metals, polymers, dielectrics, semiconductors and many more. In an ICP etching system the sample or the substrate is loaded into the vacuum chamber where the plasma is formed. In the plasma, the positive ions are highly energized and when directed towards the surface of the substrate material, they only etch material that is required, leaving fine patterns that are important for the formation of ICs, MEMS, semiconductors, and complex electronic components.

The main application of ICP etching systems is in its capacity to generate high density plasma while allowing for fine control in etching, thereby creating microstructures with dense patterns on the substrate without damaging the material. This technology is highly essential in any etching processes that involve large feature sizes or any patterning processes that require small features sizes and high aspect ratios like in semiconductors, nanotechnology, metals, and advanced materials. The global ICP etching system Market has witnessed robust growth over the past decade, driven by the increasing demand for miniaturized electronic devices, advancements in semiconductor technology, and the rising adoption of plasma etching systems in various industries. ICP etching systems are integral to the manufacturing of semiconductors, MEMS, and other advanced electronic components.

The ICP etching system market is anticipated to reach USD XXX.X million by 2034 from USD XXX.X million in 2023, at a CAGR of XX.X% during the forecast period 2024-2034.


The semiconductor industry is at the forefront of technological innovation, with continuous advancements in manufacturing processes. The transition towards smaller and more efficient microchips has necessitated the use of ICP etching systems, which offer high precision and control. Moreover, as industries continue to push the boundaries of technology, the demand for ICP etching systems is expected to grow, particularly in regions such as North America, Asia-Pacific, and Europe, which is expected to further boost the ICP etching system market during the forecast period 2024-2034.

Growth Drivers:

The semiconductor industry supports all electronics today starting from smart phones, computers to numerous other digital technologies. The thrust for increasing the functionality and miniaturizing electronic gadgets and appliances that are power efficient is fueling the development of superior semiconductors. For instance, according to the Semiconductor Industry Association (SIA), the global semiconductor industry sales accounted for USD 149.9 billion during the second quarter of 2024, an increase of 18.3% compared to the second quarter of 2023 and 6.5% more than the first quarter of 2024. In addition, increased establishment of semiconductor fabrication plants across the world especially in Asia-Pacific and North America region continues to boost the demand for ICP etching systems.

Originally the semiconductor industry used a major part of ICP etching systems, however, other industries began to use it more frequently because of its accuracy and applicability. The proven practical ICP etching extensions into MEMS, nanofabrication, and photonics, are particularly recognized as the growth stimulants for the global market. For instance, increasing incorporation of MEMS in automobiles, healthcare and consumer electronics is a key factor expected to boost demand for ICP etching systems. Micro electro-mechanical systems (MEMS) consist of sensors, actuating devices and micro structures that need precise and controlled etching to make it suitable for the specific application.

The consistently advancing nature of the etching technology has been a major market driving force for the ICP etching system market. The manufacturers are always keen on coming up with better etching systems that can segregate the materials better to meet the increasing needs of the semiconductors. Probably one of the most important development in ICP etching is the high aspect ratio etching that is necessary for creating deep trench and via in semiconductor VLSI devices. More specifically, as semiconductor structures like 3D NAND memory are being further developed, the need for ICP etching systems rises significantly.

ICP Etching System Segmentation:

By Type:

·         Planar ICP Source

·         Cylindrical ICP Source

·         Beamed ICP Source

·         Others

By Loading Type:

·         Open-Load ICP Etching Systems

·         Load-Lock ICP Etching Systems

·         Others

By Sales Channel:

·         Up to 50 mm

·         Up to 200 mm

·         Others

By Application:

·         Semiconductors

·         LED

·         MEMS Fabrication

·         Metals

·         Polymers

·         Others

By End-Users:

·         Semiconductor Industry

·         Electrical & Electronics Industry

·         Foundries

·         Integrated Device Manufacturers (IDM)

·         Research Institutions

·         Others

By Region:

·         North America

·         Europe

·         Asia Pacific

·         Latin America

·         Middle East and Africa

ICP Etching System Market by Type Review:

Based on the type, the ICP Etching System market is segmented into four segments including planar ICP source, cylindrical ICP source, beamed ICP source, and others. On the basis of type, the planar ICP source segment is expected to dominate the market in terms of market share, while the cylindrical ICP source segment is predicted to grow at the highest rate in terms of CAGR during the forecast period.


ICP Etching System Market by Loading Type Review:

Based on the loading type, the market is segmented into open-load ICP etching systems, load-lock ICP etching systems, and others. On the basis of loading type, the load-lock ICP etching systems segment is expected to be the largest in terms of market share, while the segment is also predicted to grow at the highest rate in terms of CAGR during the forecast period.

ICP Etching System Market by Processing Size Review:

Based on the processing size, the market is segmented into up to 50 mm, up to 200 mm, and others. On the basis of processing size, the up to 200 mm segment is expected to be the largest in terms of market share, while the others segment is predicted to grow at the highest rate in terms of CAGR during the forecast period.

ICP Etching System Market by Application Review:

Based on the application, the market is segmented into semiconductors, LED, MEMS fabrication, metals, polymers, and others. On the basis of application, the semiconductor segment is expected to be the largest in terms of market share, while the MEMS fabrication segment is predicted to grow at the highest rate in terms of CAGR during the forecast period.

ICP Etching System Market by End-Users Review:

Based on the end-users, the market is segmented into semiconductor industry, electrical & electronics industry, foundries, integrated device manufacturers (IDM), research institutions, and others. On the basis of end-users, the semiconductor industry segment is expected to be the largest in terms of market share, while the research institutions segment is predicted to grow at the highest rate in terms of CAGR during the forecast period.

Regional Outlook:

The ICP etching system market research report offers detailed analysis and forecasts for five major regions i.e., North America, Europe, Asia Pacific, Latin America, and Middle East and Africa.

The Asia Pacific region is forecasted to maintain its dominant position in the global ICP etching system market, accounting for a projected market share of XX.X% in 2023. The regional ICP etching system market is mainly attributed to ICP’s major application in the semiconductor field, accelerating industrialization and the growing consumer electronics market. Significant advancements in this region owe to its technological infrastructure and colossal support from the government and investments in high-tech industries that have effectively and efficiently established this region as a leading manufacturer and developer of ICP etching systems. Furthermore, the growth of the consumer electronics industry and the rising uses of technological advancements, including 5G networks, IoT, and AI, is anticipated to fuel the ICP etching system market in the Asia Pacific region in the forecast period of 2024-2034.

The Asia Pacific region is home to some of the largest and technologically most advanced semiconductor production regions such as Taiwan, South Korea, Japan, and China. They are the dominant players in the semiconductor manufacturing as well as technologies, positioning Asia Pacific as a strategic market for the ICP etching system.

Demand for ICP etching systems is being fueled by large capital investments in semiconductor manufacturing facilities and technology enhancement. These investments are evidence of the region’s desire to continue to be at the cutting edge in the global semiconductor market. Moreover, the government supporting policies and policies regard as incentives boost the production of semiconductor and thus contributes to the market growth. For instance, the Chinese strategy ‘Made in China 2025’, which involves increasing local manufacturing of semiconductors, would require the use of more advanced etching equipment’s.

Moreover, advancements in etching solutions such as increased accuracy, regulation, and effectiveness, improving the performance of ICP etching systems, which is expected to further boost the market growth in the region during the forecast period 2024-2034.


The major countries within the North American ICP etching system market include the United States and Canada. The dominance of the semiconductor manufacturing, highly developed R&D base in the region and early adoption of new technologies are the main factors stimulating the market growth. The North America region comprises of key semiconductor manufacturing companies like Intel, AMD and Qualcomm which increases the need for innovative ICP etching systems. Further, huge investments in 5G network and advanced electronics create a higher demand for semiconductor in the region, which is anticipated to propagate the growth of the market in the region during the forecast period of 2024-2034.

Key Companies in ICP Etching System Market:

The research report offers a competitive analysis of prominent companies operating in the global ICP etching system market. Some of the leading players profiled in the market research report include:

·         Tokyo Electron Limited

·         Oxford Instruments

·         Panasonic Holdings Corporation

·         LAM RESEARCH CORPORATION

·         Applied Materials, Inc.

·         Hitachi High-Tech Corporation

·         SPTS Technologies Ltd.

·         Plasma-Therm

·         Samco, Inc.

·         GigaLane Co., Ltd. 

·         Other Player’s

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